| Wafer (Glass) Size & Thickness | 可同时12 Inch(Ø300mm) Wafer (0.7T), Glass (0.5T) Wafer, Glass 供应Wafer & Glass |
|---|---|
| 洗净力 | 96~99% (标准：3㎛ Spacer) ※ 以CTS标准粒子（Standard Particle）为标准 |
| Nozzle 标准 Gap | 1.5~2.0 mm |
| Moving type | Stage moving |
| 电源 | AC 208V 3P 60Hz |
| 供应Wafer & Glass | By Robot |
