| Wafer (Glass) Size & Thickness | 12 Inch(Ø300mm) Wafer(0.7T), Glass(0.5T) Wafer, Glass simultaneously available |
|---|---|
| Cleaning Power | 96~99% (Based on 3 ㎛ Spacers) ※ According to CTS standard particle |
| Nozzle standard Gap | 1.5~2.0 mm |
| Moving type | Stage moving |
| Power | AC 208V 3P 60Hz |
| Wafer & Glass Supply | By Robot |
